Experimental study of silicon ring resonators and ultra-low losses waveguides for efficient silicon optical interposers

V. Reboud; B. Blampey; P. Gindre; O. Dubray; D. Fowler; O. Lemonnier; E. Grellier; M. Fournier; Y. Thonnart; S. Bernabe

doi:10.1117/12.2212665

15 March 2016 Experimental study of silicon ring resonators and ultra-low losses waveguides for efficient silicon optical interposers

V. Reboud, B. Blampey, P. Gindre, O. Dubray, D. Fowler, O. Lemonnier, E. Grellier, M. Fournier, Y. Thonnart, S. Bernabe

Author Affiliations +

Proceedings Volume 9753, Optical Interconnects XVI; 975312 (2016) https://doi.org/10.1117/12.2212665
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We study the optical performances of microring resonator modulators fabricated on 200 mm SOI wafers to select the ring resonator modulators for targeted ONoC and optical interposer applications. Counter-doped ring resonator modulators were fabricated to guarantee the absence of unexpected p-i-n junctions in the ring waveguide due to overlay misalignments inherent to successive fabrication steps. The fabricated add-drop ring resonator modulators showed good DC performances with a VπL at 1.55 V.cm. Finally, ultra-low loss waveguides were realized to allow long distance data transport on photonic chips.

Citation Download Citation

V. Reboud, B. Blampey, P. Gindre, O. Dubray, D. Fowler, O. Lemonnier, E. Grellier, M. Fournier, Y. Thonnart, and S. Bernabe "Experimental study of silicon ring resonators and ultra-low losses waveguides for efficient silicon optical interposers", Proc. SPIE 9753, Optical Interconnects XVI, 975312 (15 March 2016); https://doi.org/10.1117/12.2212665

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