Low-cost facile interferometer for displacement mapping of harmonically excited MEMS

Mateusz Mądzik; Jaime Viegas

doi:10.1117/12.2213822

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16 March 2016 Low-cost facile interferometer for displacement mapping of harmonically excited MEMS

Mateusz Mądzik, Jaime Viegas

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Proceedings Volume 9754, Photonic Instrumentation Engineering III; 975404 (2016) https://doi.org/10.1117/12.2213822
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

In this work, we present a simple, assembled from readily available components, low cost, imaging vibrometer based on a Twyman-Green interferometer with digital interferogram acquisition, allowing to map displacement contour levels of a harmonically excited piezoelectric membrane, on the principle of exposure integration. We experimentally demonstrate the capabilities of our setup on imaging the 4th mechanical mode of vibration of a 200 micrometer radius piezoelectric micromachined ultrasonic transducer membrane vibrating at 842 kHz, with an out-of-plane amplitude of 475 nm. Our results allow a direct visualization of the influence of etching trenches onto the vibrating membrane, in excellent agreement with FEM simulations.

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Mateusz Mądzik and Jaime Viegas "Low-cost facile interferometer for displacement mapping of harmonically excited MEMS", Proc. SPIE 9754, Photonic Instrumentation Engineering III, 975404 (16 March 2016); https://doi.org/10.1117/12.2213822

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