15 March 2016 A pseudo optical frequency comb interferometry by an optical resonator and a high-speed swept-source for 2D single-shot tomography and profilometry
Author Affiliations +
Abstract
Pseudo optical frequency comb using a high-speed frequency laser scanner and an optical resonator is generated as a virtual broadband lightsource for the time-domain 2D single-shot tomography and profilometry. High-speed laser scanner (40 kHz) is realized using a broadband semiconductor optical amplifier (SOA) whose individual wavelengths are consequently picked up by a conventional grating setup and a high speed polygon mirror. The performance of the pseudo frequency comb is confirmed by a measurement of a reference step-height sample with an optical zooming operation.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Q. T. Banh, T. Shioda, "A pseudo optical frequency comb interferometry by an optical resonator and a high-speed swept-source for 2D single-shot tomography and profilometry", Proc. SPIE 9754, Photonic Instrumentation Engineering III, 975419 (15 March 2016); doi: 10.1117/12.2211995; https://doi.org/10.1117/12.2211995
PROCEEDINGS
6 PAGES


SHARE
Back to Top