Two-dimensional designed fabrication of subwavelength grating HCG mirror on silicon-on-insulator

Shen-Che Huang; Kuo-Bin Hong; Tien-Chang Lu; Sailing He

doi:10.1117/12.2212390

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15 March 2016 Two-dimensional designed fabrication of subwavelength grating HCG mirror on silicon-on-insulator

Shen-Che Huang, Kuo-Bin Hong, Tien-Chang Lu, Sailing He

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Proceedings Volume 9757, High Contrast Metastructures V; 97570C (2016) https://doi.org/10.1117/12.2212390
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We designed and fabricated a two dimensional high contrast subwavelength grating (HCG) mirrors. The computer-aided software was employed to verify the structural parameters including grating periods and filling factors. From the optimized simulation results, the designed HCG structure has a wide reflection stopband (reflectivity (R) >90%) of over 200 nm, which centered at telecommunication wavelength. The optimized HCG mirrors were fabricated by electron beam lithography and inductively coupled plasma process technique. The experimental result was almost consistent with calculated data. This achievement should have an impact on numerous photonic devices helpful attribution to the integrated HCG VCSELs in the future.

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Shen-Che Huang, Kuo-Bin Hong, Tien-Chang Lu, and Sailing He "Two-dimensional designed fabrication of subwavelength grating HCG mirror on silicon-on-insulator", Proc. SPIE 9757, High Contrast Metastructures V, 97570C (15 March 2016); https://doi.org/10.1117/12.2212390

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