Polymer strip-loaded waveguides on ALD-TiO2 films

Leila Ahmadi; Ville Kontturi; Janne Laukkanen; Markku Kuittinen; Jyrki Saarinen; Seppo Honkanen; Matthieu Roussey

doi:10.1117/12.2212324

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16 March 2016 Polymer strip-loaded waveguides on ALD-TiO₂ films

Leila Ahmadi, Ville Kontturi, Janne Laukkanen, Markku Kuittinen, Jyrki Saarinen, Seppo Honkanen, Matthieu Roussey

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Proceedings Volume 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX; 97590D (2016) https://doi.org/10.1117/12.2212324
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We propose and demonstrate a low cost, large area, and mass production compatible method to fabricate strip-loaded waveguide structures. The structure is fabricated by combination of Atomic Layer Deposition and replication technique without applying any etching process to form the strip. The waveguide was realized in ring resonator configuration which eases the characterization process. The guiding layer is a 200 nm-thick TiO₂ layer integrated with polymer strips to load light in the high index thin film. Due to the characteristic of the applied fabrication technique, achieving a very low propagation losses is expected.

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Leila Ahmadi, Ville Kontturi, Janne Laukkanen, Markku Kuittinen, Jyrki Saarinen, Seppo Honkanen, and Matthieu Roussey "Polymer strip-loaded waveguides on ALD-TiO₂ films", Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97590D (16 March 2016); https://doi.org/10.1117/12.2212324

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