14 March 2016 Holographic fabrication of 3D photonic crystal templates with 4, 5, and 6-fold rotational symmetry using a single beam and single exposure
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Abstract
A method of fabricating large-volume three-dimensional (3D) photonic crystal and quasicrystal templates using holographic lithography is presented. Fabrication is accomplished using a single-beam and single exposure by a reflective optical element (ROE). The ROE is 3D printed support structure which holds reflecting surfaces composed of silicon or gallium arsenide. Large-volume 3D photonic crystal and quasicrystal templates with 4-fold, 5-fold, and 6-fold symmetry were fabricated and found to be in good agreement with simulation. Although the reflective surfaces were setup away from the Brewster's angle, the interference among the reflected s and p-polarizations still generated bicontinuous structures, demonstrating the flexibility of the ROE. The ROE, being a compact and inexpensive alternative to diffractive optical elements and top-cut prisms, facilitates the large-scale integration of holographically fabricated photonic structures into on-chip applications.
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David Lowell, David Lowell, David George, David George, Jeffery Lutkenhaus, Jeffery Lutkenhaus, Usha Philipose, Usha Philipose, Hualiang Zhang, Hualiang Zhang, Yuankun Lin, Yuankun Lin, "Holographic fabrication of 3D photonic crystal templates with 4, 5, and 6-fold rotational symmetry using a single beam and single exposure", Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97590H (14 March 2016); doi: 10.1117/12.2213606; https://doi.org/10.1117/12.2213606
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