WGP structures patterned by Lloyd's mirror laser interference lithography system integrate into MEMS physical sensor device

Kuo-Chun Tseng; Shuo-Ting Hong; Te-Hsun Lin; Tzu-Han Chuang; Chien-Chung Fu

doi:10.1117/12.2211917

14 March 2016 WGP structures patterned by Lloyd's mirror laser interference lithography system integrate into MEMS physical sensor device

Kuo-Chun Tseng, Shuo-Ting Hong, Te-Hsun Lin, Tzu-Han Chuang, Chien-Chung Fu

Author Affiliations +

Proceedings Volume 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX; 97591E (2016) https://doi.org/10.1117/12.2211917
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Wire-grid polarizers (WGPs) are composed of 1-D nanoscale periodic structures and are widely used in liquid crystal display devices to enhance the brightness and improve the utilization rate of the backlight source. This paper proposes the design and application of a WGP device for an microelectromechanical system physical force sensor derived through an optical measurement method. Infrared (IR) light was served as the signal source, with the initial angle set incident to the WGP, which was fabricated on microstructures such as cantilever beam, thin-film or bridge structures. According to the operation principle, when a physical force affects the microstructures, the incident angle of the signal light changes, which easily produces different transmission signal values for detection by an IR photodetector. Therefore, the proposed system can be used for optical contactless sensing in physical force sensing modules. Furthermore, the WGP structure introduced in this paper was defined using laser interference lithography and deposited with Al by E-beam evaporation.

Citation Download Citation

Kuo-Chun Tseng, Shuo-Ting Hong, Te-Hsun Lin, Tzu-Han Chuang, and Chien-Chung Fu "WGP structures patterned by Lloyd's mirror laser interference lithography system integrate into MEMS physical sensor device", Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97591E (14 March 2016); https://doi.org/10.1117/12.2211917

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