Deeply-etched micromirror with vertical slit and metallic coating enabling transmission-type optical MEMS filters

Muhammad A. Othman; Yasser M. Sabry; Mohamed Sadek; Ismail M. Nassar; Diaa A. Khalil

doi:10.1117/12.2211323

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15 March 2016 Deeply-etched micromirror with vertical slit and metallic coating enabling transmission-type optical MEMS filters

Muhammad A. Othman, Yasser M. Sabry, Mohamed Sadek, Ismail M. Nassar, Diaa A. Khalil

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Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600J (2016) https://doi.org/10.1117/12.2211323
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

In this work we report a novel optical MEMS deeply-etched mirror with metallic coating and vertical slot, where the later allows reflection and transmission by the micromirror. The micromirror as well as fiber grooves are fabricated using deep reactive ion etching technology, where the optical axis is in-plane and the components are self-aligned. The etching depth is 150 μm chosen to improve the micromirror optical throughput. The vertical optical structure is Al metal coated using the shadow mask technique. A fiber-coupled Fabry-Pérot filter is successfully realized using the fabricated structure. Experimental measurements were obtained based on a dielectric-coated optical fiber inserted into a fiber groove facing the slotted micromirror. A versatile performance in terms of the free spectral range and 3-dB bandwidth is achieved.

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Muhammad A. Othman, Yasser M. Sabry, Mohamed Sadek, Ismail M. Nassar, and Diaa A. Khalil "Deeply-etched micromirror with vertical slit and metallic coating enabling transmission-type optical MEMS filters", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600J (15 March 2016); https://doi.org/10.1117/12.2211323

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