15 March 2016 Mid infrared MEMS FTIR spectrometer
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Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600K (2016) https://doi.org/10.1117/12.2210973
Event: SPIE OPTO, 2016, San Francisco, California, United States
Abstract
In this work we report, for the first time to the best of our knowledge, a bulk-micromachined wideband MEMS-based spectrometer covering both the NIR and the MIR ranges and working from 1200 nm to 4800 nm. The core engine of the spectrometer is a scanning Michelson interferometer micro-fabricated using deep reactive ion etching (DRIE) technology. The spectrum is obtained using the Fourier Transform techniques that allows covering a very wide spectral range limited by the detector responsivity. The moving mirror of the interferometer is driven by a relatively large stroke electrostatic comb-drive actuator. Zirconium fluoride (ZrF4) multimode optical fibers are used to connect light between the white light source and the interferometer input, as well as the interferometer output to a PbSe photoconductive detector. The recorded signal-to-noise ratio is 25 dB at the wavelength of 3350 nm. The spectrometer is successfully used in measuring the absorption spectra of methylene chloride, quartz glass and polystyrene film. The presented solution provides a low cost method for producing miniaturized spectrometers in the near-/mid-infrared.
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Mazen Erfan, Yasser M. Sabry, Bassem Mortada, Khaled Sharaf, Diaa Khalil, "Mid infrared MEMS FTIR spectrometer", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600K (15 March 2016); doi: 10.1117/12.2210973; https://doi.org/10.1117/12.2210973
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