Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors

S. Rombach; M. Marx; S. Gu-Stoppel; Y. Manoli

doi:10.1117/12.2209573

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15 March 2016 Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors

S. Rombach, M. Marx, S. Gu-Stoppel, Y. Manoli

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Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600Q (2016) https://doi.org/10.1117/12.2209573
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

This work presents an integrated closed-loop driving circuit for previously reported PZT resonant micro-mirrors, which is based on embedded capacitive position sensors for minimizing the system footprint. Signals with a high SNR of 84 dB were measured, when the mechanical scan angle of the micro-mirror was 2◦, so that high controlling resolution of 14 bit for the complete motion range of the mirror is enabled. The total power consumption of the closed-loop system is only 0.86mW. Measurement results of the closed-loop driven micromirror system are presented, demonstrating its competitiveness due to the great reliability, high precision and low-power consumption. Additionally, the implementation and performance of a self-resonant loop is discussed. Finally, the fabrication, temperature dependency and performance of embedded capacitive position sensors for single and dual axis PZT resonant micro-mirrors is evaluated and presented.

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S. Rombach, M. Marx, S. Gu-Stoppel, and Y. Manoli "Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600Q (15 March 2016); https://doi.org/10.1117/12.2209573

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