15 March 2016 Miniature electrically tunable rotary dual-focus lenses
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Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600U (2016) https://doi.org/10.1117/12.2211581
Event: SPIE OPTO, 2016, San Francisco, California, United States
The emerging dual-focus lenses are drawing increasing attention recently due to their wide applications in both academia and industries, including laser cutting systems, microscopy systems, and interferometer-based surface profilers. In this paper, a miniature electrically tunable rotary dual-focus lens is developed. Such a lens consists of two optical elements, each having an optical flat surface and one freeform surface. The two freeform surfaces are initialized with the governing equation Ar2θ (A is the constant to be determined, r and θ denote the radii and angles in the polar coordinate system) and then optimized by ray tracing technique with additional Zernike polynomial terms for aberration correction. The freeform surfaces are achieved by a single-point diamond turning technique and then a PDMS-based replication process is utilized to materialize the final lens elements. To drive the two coaxial elements to rotate independently, two MEMS thermal rotary actuators are developed and fabricated by a standard MUMPs process. The experimental results show that the MEMS thermal actuator provides a maximum rotation angle of about 8.2 degrees with an input DC voltage of 6.5 V, leading to a wide tuning range for both the two focal lengths of the lens. Specifically, one focal length can be tuned from about 30 mm to 20 mm while the other one can be adjusted from about 30 mm to 60 mm.
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Yongchao Zou, Yongchao Zou, Wei Zhang, Wei Zhang, Tong Lin, Tong Lin, Fook Siong Chau, Fook Siong Chau, Guangya Zhou, Guangya Zhou, } "Miniature electrically tunable rotary dual-focus lenses", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600U (15 March 2016); doi: 10.1117/12.2211581; https://doi.org/10.1117/12.2211581

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