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15 March 2016 Optically pumped 1550nm wavelength tunable MEMS VCSEL
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Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600X (2016) https://doi.org/10.1117/12.2209563
Event: SPIE OPTO, 2016, San Francisco, California, United States
Abstract
The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with an enclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells are bonded to the SOI and the last mirror is made from the deposition of dielectric materials. The design brings in flexibility to fabricate MEMS VCSELs over a wider range of wavelengths. The paper discusses results from the simulations and bonding results from fabrication. The device will push the boundaries for wavelength sweep speed and bandwidth.
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Hitesh K. Sahoo, Thor Ansbæk, Luisa Ottaviano, Elizaveta S. Semenova, Ole Hansen, and Kresten Yvind "Optically pumped 1550nm wavelength tunable MEMS VCSEL", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600X (15 March 2016); doi: 10.1117/12.2209563; https://doi.org/10.1117/12.2209563
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