15 March 2016 Hyperspectral scanning white light interferometry based on compressive imaging
Author Affiliations +
Abstract
We have developed a compressive hyperspectral imaging system that is based on single-pixel camera architecture. We have incorporated the developed system in a scanning white-light interferometer (SWLI) and showed that replacing SWLI’s CCD-based camera by the compressive hyperspectral imaging system, we have access to high-resolution multispectral images of interferometer’s fringes. Using these multi-spectral images, the system is capable of simultaneous spectroscopy of the surface, which can be used, for example, to eliminate the effect of surface contamination and providing new spectral information for fringe signal analysis which could be used to reduce the need for vertical scan, therefore making height measurement more tolerant to object’s position.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mohammad Azari, Mohammad Azari, Nasim Habibi, Nasim Habibi, Mehrdad Abolbashari, Mehrdad Abolbashari, Faramarz Farahi, Faramarz Farahi, } "Hyperspectral scanning white light interferometry based on compressive imaging", Proc. SPIE 9761, Emerging Digital Micromirror Device Based Systems and Applications VIII, 97610H (15 March 2016); doi: 10.1117/12.2213101; https://doi.org/10.1117/12.2213101
PROCEEDINGS
7 PAGES


SHARE
Back to Top