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18 March 2016 VCSELs for interferometric readout of MEMS sensors
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We report on the development of single-frequency VCSELs (vertical-cavity surface-emitting lasers) for sensing the position of a moving MEMS (micro-electro-mechanical system) object with resolution much less than 1nm. Position measurement is the basis of many different types of MEMS sensors, including accelerometers, gyroscopes, and pressure sensors. Typically, by switching from a traditional capacitive electronic readout to an interferometric optical readout, the resolution can be improved by an order of magnitude with a corresponding improvement in MEMS sensor performance. Because the VCSEL wavelength determines the scale of the position measurement, laser wavelength (frequency) stability is desirable. This paper discusses the impact of VCSEL amplitude and frequency noise on the position measurement.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Darwin K. Serkland, Kent M. Geib, Gregory M. Peake, Gordon A. Keeler, Michael J. Shaw, Michael S. Baker, and Murat Okandan "VCSELs for interferometric readout of MEMS sensors", Proc. SPIE 9766, Vertical-Cavity Surface-Emitting Lasers XX, 976606 (18 March 2016);

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