4 March 2016 VCSEL-based flexible opto-fluidic fluorescence sensors
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Abstract
Flexible opto-fluidic fluorescence sensors based on microscale vertical cavity surface emitting lasers (micro-VCSELs) and silicon photodiodes (Si-PDs) are demonstrated, where arrays of 850 nm micro-VCSELs and thin film Si-PDs are heterogeneously integrated on a polyethylene terephthalate (PET) substrate by transfer printing, in conjunction with elastomeric fluidic channel. Enabled with optical isolation trenches together with wavelength- and angle-selective spectral filters implemented to suppress the absorption of excitation light, the integrated flexible fluorescence sensors exhibited significantly enhanced signal-to-background ratio, resulting in a maximum sensitivity of 5 × 10-5 wt% of infrared-absorbing organic dyes.
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Dongseok Kang, Boju Gai, Jongseung Yoon, "VCSEL-based flexible opto-fluidic fluorescence sensors", Proc. SPIE 9766, Vertical-Cavity Surface-Emitting Lasers XX, 97660G (4 March 2016); doi: 10.1117/12.2213808; https://doi.org/10.1117/12.2213808
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