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8 March 2016 Process control of MOCVD growth for LEDs by in-situ photoluminescence
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Development and manufacturing of LED structures is still driven by production cost reduction and performance improvements. Therefore, in-situ monitoring during the epitaxial process plays a key role in view of further yield improvement and process optimization. With the continuing trend towards larger wafers, stronger bow and increased aspherical curvature are additional challenges the growers have to face, leading to non-uniform LED-emission. Compared to traditional in-situ metrology like curvature measurement and near UV pyrometry, in-situ photoluminescence measurements can provide a more direct access to the quantum well emission already during growth. In this paper we show how in-situ photoluminescence measurements can be used in a production type multi-wafer MOCVD system to characterize the quantum well emission already during growth. We also demonstrate how deviations from the desired wavelength can be detected and corrected in the same growth run. Since the method is providing spatially resolved line-scans across the wafer, also the uniformity of the emission wavelength can be characterized already during growth. Comparison of in-situ and ex-situ photoluminescence data show excellent agreement with respect to wavelength uniformity on 4 inch wafers.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Prall, C. Prall, C. Kaspari, M. Weyers, D. Rueter, F. Brunner, K. Haberland, C. Kaspari, F. Brunner, M. Weyers, and D. Rueter "Process control of MOCVD growth for LEDs by in-situ photoluminescence", Proc. SPIE 9768, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XX, 97681A (8 March 2016);

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