EUV Source I
EUV Source II
EUV Resist I
EUV Resist II
EUV Patterning I
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Challenge toward breakage of RLS trade-off for EUV lithography by Photosensitized Chemically Amplified Resist (PSCAR) with flood exposure
Etched-multilayer black border formed on EUV mask: Does it cause image degradation during pattern inspection using EB optics?
Throughput compensation through optical proximity correction for realization of an extreme-ultraviolet pellicle
Free electron lasers for 13nm EUV lithography: RF design strategies to minimise investment and operational costs
Sensitivity enhancement of chemically amplified resists and performance study using EUV interference lithography
Improved Ru/Si multilayer reflective coatings for advanced extreme-ultraviolet lithography photomasks
Enhancing native defect sensitivity for EUV actinic blank inspection: optimized pupil engineering and photon noise study
Extreme ultraviolet patterned mask inspection performance of advanced projection electron microscope system for 11nm half-pitch generation
Application of EUV resolution enhancement techniques (RET) to optimize and extend single exposure bi-directional patterning for 7nm and beyond logic designs