18 March 2016 Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source
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Abstract
We develop a new simulation code for the optimization of efficiency of the laser pumped plasma (LPP) extreme ultra violet (EUV) light source, which is applicable to the pre-plasma formation from a tin droplet target irradiated by a pre-pulse laser. We investigate algorithms of reorganization of the mesh for the Lagrangian hydrodynamics simulation. We also investigate the model of the liquid to gas phase transition to calculate the dynamics of particle formation through the laser ablation.
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Akira Sasaki, Akira Sasaki, Katsunobu Nishihara, Katsunobu Nishihara, Atushi Sunahara, Atushi Sunahara, Hiroyuki Furukawa, Hiroyuki Furukawa, Takeshi Nishikawa, Takeshi Nishikawa, "Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source", Proc. SPIE 9776, Extreme Ultraviolet (EUV) Lithography VII, 97762C (18 March 2016); doi: 10.1117/12.2219045; https://doi.org/10.1117/12.2219045
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