22 March 2016 DSA materials contributions to the defectivity performance of 14nm half-pitch LiNe flow at IMEC
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Abstract
This manuscript shows the relationship between defectivity of a typical chemo-epitaxy sequence and the DSA-specific materials, namely the mat, the brush and the block co-polymer. We demonstrate that the density of assembly defects in a line-space DSA flow, namely the dislocations and 1-period bridges have a direct correlation to certain parameters in the synthesis sequence of these materials. The primary focus of this manuscript is on identifying, controlling and reproducing the defects-critical parameters in the block co-polymer synthesis process for a stable and low defect performance of DSA flows.
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Hari Pathangi, Hari Pathangi, Varun Vaid, Varun Vaid, Boon Teik Chan, Boon Teik Chan, Nadia Vandenbroeck, Nadia Vandenbroeck, Jin Li, Jin Li, Sung Eun Hong, Sung Eun Hong, Yi Cao, Yi Cao, Baskaran Durairaj, Baskaran Durairaj, Guanyang Lin, Guanyang Lin, Mark Somervell, Mark Somervell, Takahiro Kitano, Takahiro Kitano, Ryota Harukawa, Ryota Harukawa, Kaushik Sah, Kaushik Sah, Andrew Cross, Andrew Cross, Hareen Bayana, Hareen Bayana, Lucia D’Urzo, Lucia D’Urzo, Roel Gronheid, Roel Gronheid, "DSA materials contributions to the defectivity performance of 14nm half-pitch LiNe flow at IMEC", Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97770G (22 March 2016); doi: 10.1117/12.2219936; https://doi.org/10.1117/12.2219936
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