Shape optimization for DSA

Gaddiel Ouaknin; Nabil Laachi; Kris Delaney; Glenn Fredrickson; Frederic Gibou

doi:10.1117/12.2218515

22 March 2016 Shape optimization for DSA

Gaddiel Ouaknin, Nabil Laachi, Kris Delaney, Glenn Fredrickson, Frederic Gibou

Author Affiliations +

Proceedings Volume 9777, Alternative Lithographic Technologies VIII; 97770Y (2016) https://doi.org/10.1117/12.2218515
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

Directed self-assembly using block copolymers for positioning vertical interconnect access in integrated circuits relies on the proper shape of a confined domain in which polymers will self-assemble into the targeted design. Finding that shape, i.e., solving the inverse problem, is currently mainly based on trial and error approaches. We introduce a level-set based algorithm that makes use of a shape optimization strategy coupled with self-consistent field theory to solve the inverse problem in an automated way. It is shown that optimal shapes are found for different targeted topologies with accurate placement and distances between the different components.

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Gaddiel Ouaknin, Gaddiel Ouaknin, Nabil Laachi, Nabil Laachi, Kris Delaney, Kris Delaney, Glenn Fredrickson, Glenn Fredrickson, Frederic Gibou, Frederic Gibou, "Shape optimization for DSA", Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97770Y (22 March 2016); doi: 10.1117/12.2218515; https://doi.org/10.1117/12.2218515

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