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1 April 2016 Control of morphological defects at the boundary between the periodic and non-periodic patterns in directed self-assembly process
Akihisa Yoshida, Kenji Yoshimoto, Masahiro Ohshima, Katsuyoshi Kodera, Yoshihiro Naka, Hideki Kanai, Sachiko Kobayashi, Simon Maeda, Phubes Jiravanichsakul, Katsutoshi Kobayashi, Hisako Aoyama
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Proceedings Volume 9777, Alternative Lithographic Technologies VIII; 97771O (2016) https://doi.org/10.1117/12.2218234
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States
Abstract
In this study, we investigated a directed self-assembly (DSA) flow that could include a non-periodic pattern (i.e., wide line) lying in between the periodic line/space patterns, in a relatively simple and inexpensive way. A symmetric poly(styrene-block-methyl methacrylate) (PS-b-PMMA) with the natural periodicity (L0) of 30 nm was employed here. Our DSA flow has two key features. First, we used a hybrid approach that combined chemoepitaxy and graphoepitaxy methods to generate PMMA-attractive pinning guide patterns directly from ArF resist. Second, we attempted to utilize both the perpendicular lamellae in the periodic regions and the horizontal lamellae on the non-periodic pattern as an etch template. The advantage of this process will be a reduction of the number of lithographic processes, whereas the challenge is how to control the mixed morphologies at the boundary between the periodic and non-periodic regions. Our preliminary results from simulations and experiments showed that, in order to generate the horizontal lamellae on the non-periodic pattern, the PS-b-PMMA thickness on top of the non-periodic guide pattern should roughly match to ~1 L0, and the width of the non-periodic pattern should be larger than ~3-4 L0. In addition, the space between the periodic and non-periodic regions was found to be critical and it should be basically equal to the space between the guiding pins in the periodic regions (~75 nm) to minimize the formation of fingerprint morphology at the boundaries.
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Akihisa Yoshida, Akihisa Yoshida, Kenji Yoshimoto, Kenji Yoshimoto, Masahiro Ohshima, Masahiro Ohshima, Katsuyoshi Kodera, Katsuyoshi Kodera, Yoshihiro Naka, Yoshihiro Naka, Hideki Kanai, Hideki Kanai, Sachiko Kobayashi, Sachiko Kobayashi, Simon Maeda, Simon Maeda, Phubes Jiravanichsakul, Phubes Jiravanichsakul, Katsutoshi Kobayashi, Katsutoshi Kobayashi, Hisako Aoyama, Hisako Aoyama, "Control of morphological defects at the boundary between the periodic and non-periodic patterns in directed self-assembly process", Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97771O (1 April 2016); doi: 10.1117/12.2218234; https://doi.org/10.1117/12.2218234
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