1 April 2016 Improved cost-effectiveness of the block co-polymer anneal process for DSA
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Abstract
This manuscript first presents a cost model to compare the cost of ownership of DSA and SAQP for a typical front end of line (FEoL) line patterning exercise. Then, we proceed to a feasibility study of using a vertical furnace to batch anneal the block co-polymer for DSA applications. We show that the defect performance of such a batch anneal process is comparable to the process of record anneal methods. This helps in increasing the cost benefit for DSA compared to the conventional multiple patterning approaches.
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Hari Pathangi, Maarten Stokhof, Werner Knaepen, Varun Vaid, Arindam Mallik, Boon Teik Chan, Nadia Vandenbroeck, Jan Willem Maes, Roel Gronheid, "Improved cost-effectiveness of the block co-polymer anneal process for DSA", Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97771Z (1 April 2016); doi: 10.1117/12.2220043; https://doi.org/10.1117/12.2220043
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