1 April 2016 Improved cost-effectiveness of the block co-polymer anneal process for DSA
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Abstract
This manuscript first presents a cost model to compare the cost of ownership of DSA and SAQP for a typical front end of line (FEoL) line patterning exercise. Then, we proceed to a feasibility study of using a vertical furnace to batch anneal the block co-polymer for DSA applications. We show that the defect performance of such a batch anneal process is comparable to the process of record anneal methods. This helps in increasing the cost benefit for DSA compared to the conventional multiple patterning approaches.
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Hari Pathangi, Hari Pathangi, Maarten Stokhof, Maarten Stokhof, Werner Knaepen, Werner Knaepen, Varun Vaid, Varun Vaid, Arindam Mallik, Arindam Mallik, Boon Teik Chan, Boon Teik Chan, Nadia Vandenbroeck, Nadia Vandenbroeck, Jan Willem Maes, Jan Willem Maes, Roel Gronheid, Roel Gronheid, "Improved cost-effectiveness of the block co-polymer anneal process for DSA", Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97771Z (1 April 2016); doi: 10.1117/12.2220043; https://doi.org/10.1117/12.2220043
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