1 April 2016 Reversible nano-lithography for commercial approaches
Author Affiliations +
Abstract
The methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro- or nano-scale sensors and actuators.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jae Hong Park, Jae Hong Park, Hyun Ik Jang, Hyun Ik Jang, Woo Choong Kim, Woo Choong Kim, Hae Su Yun, Hae Su Yun, Jun Yong Park, Jun Yong Park, Seok Woo Jeon, Seok Woo Jeon, Hee Yeoun Kim, Hee Yeoun Kim, Chi Won Ahn, Chi Won Ahn, } "Reversible nano-lithography for commercial approaches", Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 977723 (1 April 2016); doi: 10.1117/12.2205065; https://doi.org/10.1117/12.2205065
PROCEEDINGS
6 PAGES


SHARE
Back to Top