In order to address the signal formation physics, an effort is made towards studying the swing-curve phenomena through wavelength and polarizations on production stacks using simulations as well as experimental technique using DBO. The results provide a wealth of information on target and recipe selection for robustness. Details from simulation and measurements will be reported in this technical publication.
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Kaustuve Bhattacharyya, Arie den Boef, Greet Storms, Joost van Heijst, Marc Noot, Kevin An, Noh-Kyoung Park, Se-Ra Jeon, Nang-Lyeom Oh, Elliott McNamara, Frank van de Mast, SeungHwa Oh, Seung Yoon Lee, Chan Hwang, Kuntack Lee, "A study of swing-curve physics in diffraction-based overlay," Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97781I (24 March 2016);