24 March 2016 Controlling bridging and pinching with pixel-based mask for inverse lithography
Author Affiliations +
Abstract
Inverse Lithography Technology (ILT) has become a viable computational lithography candidate in recent years as it can produce mask output that results in process latitude and CD control in the fab that is hard to match with conventional OPC/SRAF insertion approaches.

An approach to solving the inverse lithography problem as a nonlinear, constrained minimization problem over a domain mask pixels was suggested in the paper by Y. Granik “Fast pixel-based mask optimization for inverse lithography” in 2006. The present paper extends this method to satisfy bridging and pinching constraints imposed on print contours.

Namely, there are suggested objective functions expressing penalty for constraints violations, and their minimization with gradient descent methods is considered. This approach has been tested with an ILT-based Local Printability Enhancement (LPTM) tool in an automated flow to eliminate hotspots that can be present on the full chip after conventional SRAF placement/OPC and has been applied in 14nm, 10nm node production, single and multiple-patterning flows.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sergey Kobelkov, Sergey Kobelkov, Alexander Tritchkov, Alexander Tritchkov, JiWan Han, JiWan Han, "Controlling bridging and pinching with pixel-based mask for inverse lithography", Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97782X (24 March 2016); doi: 10.1117/12.2219281; https://doi.org/10.1117/12.2219281
PROCEEDINGS
9 PAGES


SHARE
RELATED CONTENT

RET selection on state-of-the-art NAND flash
Proceedings of SPIE (March 17 2015)
Full-flow RET creation, comparison, and selection
Proceedings of SPIE (October 28 2014)
Layer aware source mask target optimization
Proceedings of SPIE (March 14 2016)
A novel full chip process window OPC based on matrix...
Proceedings of SPIE (March 14 2016)
Case study: the impact of VSB fracturing
Proceedings of SPIE (May 18 2008)

Back to Top