8 March 2016 Method for fast computation of angular light scattering spectra from 2D periodic arrays
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Abstract
An efficient numerical method for computing angle-resolved light scattering off periodic arrays is presented. The method combines finite-element discretization with a Schur complement solver. A significant speed-up of the computations in comparison to standard finite-element method computations is observed.
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Jan Pomplun, Jan Pomplun, Sven Burger, Sven Burger, Lin Zschiedrich, Lin Zschiedrich, Philipp Gutsche, Philipp Gutsche, Frank Schmidt, Frank Schmidt, "Method for fast computation of angular light scattering spectra from 2D periodic arrays", Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 977839 (8 March 2016); doi: 10.1117/12.2219666; https://doi.org/10.1117/12.2219666
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