8 March 2016 Metrology target design simulations for accurate and robust scatterometry overlay measurements
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Abstract
Overlay metrology target design is an essential step prior to performing overlay measurements. This step is done through the optimization of target parameters for a given process stack. A simulation tool is therefore used to improve measurement performances. This work shows how our Metrology Target Design (MTD) simulator helps significantly in the target design process. We show the role of film and Optical CD measurements in improving significantly the fidelity of the simulations. We demonstrate that for various target design parameters we are capable of predicting measured performance metrics by simulations and correctly rank various designs performances.
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Guy Ben-Dov, Guy Ben-Dov, Inna Tarshish-Shapir, Inna Tarshish-Shapir, David Gready, David Gready, Mark Ghinovker, Mark Ghinovker, Mike Adel, Mike Adel, Eitan Herzel, Eitan Herzel, Soonho Oh, Soonho Oh, DongSub Choi, DongSub Choi, Sang Hyun Han, Sang Hyun Han, Mohamed El Kodadi, Mohamed El Kodadi, Chan Hwang, Chan Hwang, Jeongjin Lee, Jeongjin Lee, Seung Yoon Lee, Seung Yoon Lee, Kuntack Lee, Kuntack Lee, "Metrology target design simulations for accurate and robust scatterometry overlay measurements", Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97783B (8 March 2016); doi: 10.1117/12.2219108; https://doi.org/10.1117/12.2219108
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