Excursion detection using leveling data

MinGyu Kim; Jaewuk Ju; Boris Habets; Georg Erley; Enrico Bellmann; Seop Kim

doi:10.1117/12.2230389

8 March 2016 Excursion detection using leveling data

MinGyu Kim; Jaewuk Ju; Boris Habets; Georg Erley; Enrico Bellmann; Seop Kim

Author Affiliations +

Proceedings Volume 9778, Metrology, Inspection, and Process Control for Microlithography XXX; 97783O (2016) https://doi.org/10.1117/12.2230389
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

Wafer leveling data are usually used inside the exposure tool for ensuring good focus, then discarded. This paper describes the implementation of a monitoring and analysis solution to download these data automatically, together with the correction profiles applied by the scanner. The resulting height maps and focus residuals form the basis for monitoring metrics tailored to catching tool and process drifts and excursions in a high-volume manufacturing (HVM) environment.

In this paper, we present four six cases to highlight the potential of the method: wafer edge monitoring, chuck drift monitoring, correlations between focus residuals and overlay errors, and pre-process monitoring by chuck fingerprint removal.

Citation Download Citation

MinGyu Kim, MinGyu Kim, Jaewuk Ju, Jaewuk Ju, Boris Habets, Boris Habets, Georg Erley, Georg Erley, Enrico Bellmann, Enrico Bellmann, Seop Kim, Seop Kim, } "Excursion detection using leveling data", Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97783O (8 March 2016); doi: 10.1117/12.2230389; https://doi.org/10.1117/12.2230389

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years