In this study, we use three-dimensional self-consistent field theory (SCFT) simulations to investigate the equilibrium and metastable defective configurations of di-block copolymer DSA systems in the presence of chemically selective or neutral template sidewalls and preferentially attractive striped substrates. We identify chemo-patterning schemes that maximize defect energies, including sidewall interaction strength and chemical preference. In addition, we discuss chemo-patterning schemes that backfire, creating even more complicated and persistent defect modes such as horizontal half-cylinders on the system substrate.
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Corinne L. Carpenter, Kris T. Delaney, Glenn H. Fredrickson, "Directed self-assembly of diblock copolymers in multi-VIA configurations: effect of chemopatterned substrates on defectivity," Proc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 97791E (21 March 2016);