25 March 2016 Spin-on-carbon hard masks utilising fullerene derivatives
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Abstract
We have developed a range of fullerene containing materials for use as organic hard masks. Recent advances in material development are reported together with some results from external evaluations of the original HM100 series. Initial results for the new HM340-383-010 formulation show it to have a high thermal stability (~5.5 % mass loss at 400°C) and a very high carbon content (at 95.3%), offering high etch durability.
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Alan G. Brown, Alan G. Brown, Andreas Frommhold, Andreas Frommhold, Tom Lada, Tom Lada, J. Bowen, J. Bowen, Z. el Otell, Z. el Otell, Alex P. G. Robinson, Alex P. G. Robinson, "Spin-on-carbon hard masks utilising fullerene derivatives", Proc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 977927 (25 March 2016); doi: 10.1117/12.2219212; https://doi.org/10.1117/12.2219212
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