EB and EUV lithography using inedible cellulose-based biomass resist material

Satoshi Takei; Makoto Hanabata; Akihiro Oshima; Miki Kashiwakura; Takahiro Kozawa; Seiichi Tagawa

doi:10.1117/12.2217481

21 March 2016 EB and EUV lithography using inedible cellulose-based biomass resist material

Satoshi Takei, Makoto Hanabata, Akihiro Oshima, Miki Kashiwakura, Takahiro Kozawa, Seiichi Tagawa

Proceedings Volume 9779, Advances in Patterning Materials and Processes XXXIII; 977929 (2016) https://doi.org/10.1117/12.2217481
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

The validity of our approach of inedible cellulose-based resist material derived from woody biomass has been confirmed experimentally for the use of pure water in organic solvent-free water spin-coating and tetramethylammonium hydroxide(TMAH)-free water-developable techniques of eco-conscious electron beam (EB) and extreme-ultraviolet (EUV) lithography. The water developable, non-chemically amplified, high sensitive, and negative tone resist material in EB and EUV lithography was developed for environmental affair, safety, easiness of handling, and health of the working people. The inedible cellulose-based biomass resist material was developed by replacing the hydroxyl groups in the beta-linked disaccharides with EB and EUV sensitive groups. The 50-100 nm line and space width, and little footing profiles of cellulose-based biomass resist material on hardmask and layer were resolved at the doses of 10-30 μC/cm². The eco-conscious lithography techniques was referred to as green EB and EUV lithography using inedible cellulose-based biomass resist material.

Citation Download Citation

Satoshi Takei, Makoto Hanabata, Akihiro Oshima, Miki Kashiwakura, Takahiro Kozawa, and Seiichi Tagawa "EB and EUV lithography using inedible cellulose-based biomass resist material", Proc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 977929 (21 March 2016); https://doi.org/10.1117/12.2217481

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available