In this paper a novel matrix retargeting based PWOPC was developed to find optimal OPC solutions by solving constraints-based matrix and applying minimal retargeting as needed.2 Experiment results showed enhanced process window and reasonable performance.
ACCESS THE FULL ARTICLE
Optical proximity correction
Resolution enhancement technologies
Xima Zhang, Zhitang Yu, Qingwei Liu, Xuan Shen, Liguo Zhang, Le Hong, Vlad Liubich, George Lippincott, Cynthia Zhu, James Word, "A novel full chip process window OPC based on matrix retargeting," Proc. SPIE 9780, Optical Microlithography XXIX, 97801C (15 March 2016);