15 March 2016 Spatial conversion of excimer laser beam
Author Affiliations +
The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 х 20 mm and equal divergence of 5 х 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander Grishkanich, Alexander Zhevlakov, Sergey Kascheev, Veli Kujanpaa, Timo Savinainen, "Spatial conversion of excimer laser beam", Proc. SPIE 9780, Optical Microlithography XXIX, 97801L (15 March 2016); doi: 10.1117/12.2219934; https://doi.org/10.1117/12.2219934


4MOST metrology system image processing
Proceedings of SPIE (August 09 2016)
Novel design concepts for UV laser beam shaping
Proceedings of SPIE (October 05 1999)
Preliminary optical design for Plures and Rosetta
Proceedings of SPIE (September 14 1994)
Characterization Of A UV Resist for 248 nm Lithography
Proceedings of SPIE (January 30 1989)

Back to Top