15 March 2016 Spatial conversion of excimer laser beam
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Abstract
The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 х 20 mm and equal divergence of 5 х 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.
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Alexander Grishkanich, Alexander Grishkanich, Alexander Zhevlakov, Alexander Zhevlakov, Sergey Kascheev, Sergey Kascheev, Veli Kujanpaa, Veli Kujanpaa, Timo Savinainen, Timo Savinainen, } "Spatial conversion of excimer laser beam", Proc. SPIE 9780, Optical Microlithography XXIX, 97801L (15 March 2016); doi: 10.1117/12.2219934; https://doi.org/10.1117/12.2219934
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