Line edge roughness frequency analysis for SAQP process

Lei Sun; Xiaoxiao Zhang; Shimon Levi; Adam Ge; Hua Zhou; Wenhui Wang; Navaneetha Krishnan; Yulu Chen; Erik Verduijn; Ryoung-han Kim

doi:10.1117/12.2229176

15 March 2016 Line edge roughness frequency analysis for SAQP process

Lei Sun, Xiaoxiao Zhang, Shimon Levi, Adam Ge, Hua Zhou, Wenhui Wang, Navaneetha Krishnan, Yulu Chen, Erik Verduijn, Ryoung-han Kim

Author Affiliations +

Proceedings Volume 9780, Optical Microlithography XXIX; 97801S (2016) https://doi.org/10.1117/12.2229176
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

The line edge roughness (LER) and line width roughness (LWR) transfer in a self-aligned quadruple patterning (SAQP) process is shown for the first time. Three LER characterization methods, including conventional standard deviation method, power spectral density (PSD) method and frequency domain 3-sigma method, are used in the analysis. The wiggling is also quantitatively characterized for each SAQP step with a wiggling factor. This work will benefit both process optimization and process monitoring.

Citation Download Citation

Lei Sun, Lei Sun, Xiaoxiao Zhang, Xiaoxiao Zhang, Shimon Levi, Shimon Levi, Adam Ge, Adam Ge, Hua Zhou, Hua Zhou, Wenhui Wang, Wenhui Wang, Navaneetha Krishnan, Navaneetha Krishnan, Yulu Chen, Yulu Chen, Erik Verduijn, Erik Verduijn, Ryoung-han Kim, Ryoung-han Kim, } "Line edge roughness frequency analysis for SAQP process", Proc. SPIE 9780, Optical Microlithography XXIX, 97801S (15 March 2016); doi: 10.1117/12.2229176; https://doi.org/10.1117/12.2229176

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Keywords/Phrases

Search In:

Publication Years