PROCEEDINGS VOLUME 9781
SPIE ADVANCED LITHOGRAPHY | 21-25 FEBRUARY 2016
Design-Process-Technology Co-optimization for Manufacturability X
Editor(s): Luigi Capodieci
Editor Affiliations +
Proceedings Volume 9781 is from: Logo
SPIE ADVANCED LITHOGRAPHY
21-25 February 2016
San Jose, California, United States
Front Matter: Volume 9781
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978101 (2016) https://doi.org/10.1117/12.2239765
Layout Optimization and Design Restrictions
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978102 (2016) https://doi.org/10.1117/12.2218361
Hongyi Liu, Chuyang Hong, Ting Han, Jun Zhou, Yijian Chen
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978103 (2016) https://doi.org/10.1117/12.2219267
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978104 (2016) https://doi.org/10.1117/12.2219216
Youngsoo Song, Jeemyung Lee, Seongmin Lee, Youngsoo Shin
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978105 (2016) https://doi.org/10.1117/12.2219142
Dongbing Shao, Larry Clevenger, Lei Zhuang, Lars Liebmann, Robert Wong, James Culp
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978106 (2016) https://doi.org/10.1117/12.2218636
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978107 (2016) https://doi.org/10.1117/12.2220019
Layout Analytics
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978108 (2016) https://doi.org/10.1117/12.2220021
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978109 (2016) https://doi.org/10.1117/12.2220145
Linda Zhuang, Jenny Pang, Jessy Xu, Mengfeng Tsai, Amy Wang, Yifan Zhang, Jason Sweis, Ya-Chieh Lai, Hua Ding
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810A (2016) https://doi.org/10.1117/12.2219129
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810B (2016) https://doi.org/10.1117/12.2219358
Design and Litho Optimization: Joint Session with Conferences 9780 and 9781
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810C (2016) https://doi.org/10.1117/12.2219318
Circuit Modeling
Ying Qiao, Costas J. Spanos
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810D (2016) https://doi.org/10.1117/12.2219428
Ting Han, Chuyang Hong, Qi Cheng, Yijian Chen
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810E (2016) https://doi.org/10.1117/12.2218992
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810F (2016) https://doi.org/10.1117/12.2219150
Yongchan Ban, Sang Min Han, Eunjoo Choi, Tamba Gbondo-Tugbawa, Kuang Han Chen
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810G (2016) https://doi.org/10.1117/12.2219118
Hotspot Detection and Removal
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810H (2016) https://doi.org/10.1117/12.2217746
Moutaz Fakhry, Kareem Madkour, Wael ElManhawy, Jason Cain, Joe Kwan
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810I (2016) https://doi.org/10.1117/12.2219506
Jong-hyun Lee, Chin Kim, Minsoo Kang, Sungwook Hwang, Jae-seok Yang, Mohammed Harb, Mohamed Al-Imam, Kareem Madkour, Wael ElManhawy, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810J (2016) https://doi.org/10.1117/12.2218806
Ushasree Katakamsetty, Jansen Chee, Yongfu Li, Colin Hui, Jaime Bravo, Tamba Gbondo-Tugbawa, Brian Lee, Kuang-Han Chen, Aaron Gower-Hall, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810K (2016) https://doi.org/10.1117/12.2219545
Linda Zhuang, Jenny Pang, Jessy Xu, MengFeng Tsai, Xue Long Shi, Qing Wei Liu, Ellyn Yang, Yifan Zhang, Jason Sweis, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810L (2016) https://doi.org/10.1117/12.2219561
Multiple Patterning and Directed Self-Assembly
Yibo Lin, Xiaoqing Xu, Bei Yu, Ross Baldick, David Z. Pan
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810M (2016) https://doi.org/10.1117/12.2218628
Ioannis Karageorgos, Julien Ryckaert, Maryann C. Tung, H.-S. Philip Wong, Roel Gronheid, Joost Bekaert, Evangelos Karageorgos, Kris Croes, Geert Vandenberghe, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810N (2016) https://doi.org/10.1117/12.2222041
L. Schneider, V. Farys, E. Serret, C. Fenouillet-Beranger
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810O (2016) https://doi.org/10.1117/12.2218808
Hongyi Liu, Ting Han, Jun Zhou, Yijian Chen
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810P (2016) https://doi.org/10.1117/12.2219082
P. Raghavan, F. Firouzi, L. Matti, P. Debacker, R. Baert, S. M. Y. Sherazi, D. Trivkovic, V. Gerousis, M. Dusa, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810Q (2016) https://doi.org/10.1117/12.2238928
Design Interaction with Metrology: Joint Session with Conferences 9778 and 9781
Daehan Han, Jinman Chang, Taeheon Kim, Kyusun Lee, Yonghyeon Kim, Jinyoung Kang, Aeran Hong, Bumjin Choi, Joosung Lee, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810R (2016) https://doi.org/10.1117/12.2218414
Process and Yield Modeling
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810S (2016) https://doi.org/10.1117/12.2219143
Jun Zhou, Yijian Chen
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810T (2016) https://doi.org/10.1117/12.2219336
Guillaume Landié, Vincent Farys
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810U (2016) https://doi.org/10.1117/12.2219067
Interactive Poster Session
Minyoung Shim, Seoksan Kim, Sungmin Park, Seiryung Choi, Namjung Kang, Hyunju Sung, Jinwoo Choi, Jaepil Shin, Jaekyun Park, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810V (2016) https://doi.org/10.1117/12.2218477
Helen Li, Elain Zou, Robben Lee, Sid Hong, Square Liu, JinYan Wang, Chunshan Du, Recco Zhang, Kareem Madkour, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810W (2016) https://doi.org/10.1117/12.2218540
Yingli Duan, Xiaojing Su, Ying Chen, Yajuan Su, Feng Shao, Recco Zhang, Junjiang Lei, Yayi Wei
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810X (2016) https://doi.org/10.1117/12.2218711
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810Y (2016) https://doi.org/10.1117/12.2218828
Evan Zhao, Jessie Wang, Mason Sun, Jeff Wang, Yifan Zhang, Jason Sweis, Ya-Chieh Lai, Hua Ding
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 97810Z (2016) https://doi.org/10.1117/12.2219000
Rimon Ikeno, Satoshi Maruyama, Yoshio Mita, Makoto Ikeda, Kunihiro Asada
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978110 (2016) https://doi.org/10.1117/12.2219021
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978111 (2016) https://doi.org/10.1117/12.2219171
Jerome Wandell, Mohamed Salama, William Wilkinson, Mark Curtice, Jui-Hsuan Feng, Shao Wen Gao, Abhishek Asthana
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978112 (2016) https://doi.org/10.1117/12.2219201
Helen Li, ChunLei Zhang, JinBing Liu, ZhengFang Liu, Kuang Han Chen, Tamba Gbondo-Tugbawa, Hua Ding, Flora Li, Brian Lee, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978113 (2016) https://doi.org/10.1117/12.2219912
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978114 (2016) https://doi.org/10.1117/12.2220276
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978115 (2016) https://doi.org/10.1117/12.2220778
Linghui Wu, Denny Kwa, Jinyin Wan, Tom Wang, Matt St. John, Steven Deeth, Xiaohui Chen, Tom Cecil, Xiaodong Meng, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978116 (2016) https://doi.org/10.1117/12.2222591
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978117 (2016) https://doi.org/10.1117/12.2225830
Chia Ching Lin, En Chuan Lio, Chang Mao Wang, Howard Chen, Sho Shen Lee, Henry Hsing, Kince Liu, Nuriel Amir
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability X, 978118 (2016) https://doi.org/10.1117/12.2219509
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