In this paper, we focus on the application of layout decomposition where stitching is not allowed such as for contact and via layers. We propose a linear programming and iterative rounding (LPIR) solving technique to reduce the number of non-integers in the LP relaxation problem. Experimental results show that the proposed algorithms can provide high quality decomposition solutions efficiently while introducing as few conflicts as possible.
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Yibo Lin, Xiaoqing Xu, Bei Yu, Ross Baldick, David Z. Pan, "Triple/quadruple patterning layout decomposition via novel linear programming and iterative rounding," Proc. SPIE 9781, Design-Process-Technology Co-optimization for Manufacturability X, 97810M (16 March 2016);