16 March 2016 Interlayer design verification methodology using contour image
Author Affiliations +
Memory industry has been pursuing endless shrinking technology which increases fabrication complexity. It poses problems between adjacent layers as well as within a single layer. To verify the interlayer design, we have developed the interlayer design verification methodology using contour image. Our methodology makes it possible to verify interlayer design visually by extracting the contour image from the real patterns. And we can verify interlayer design even during the fabrication process and conduct a non-destructive inspection. Also this methodology provides a statistical analysis of massive measured data. Through this methodology, we can calculate the margin of current interlayer design and suggest the requirement of design.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Minyoung Shim, Minyoung Shim, Seoksan Kim, Seoksan Kim, Sungmin Park, Sungmin Park, Seiryung Choi, Seiryung Choi, Namjung Kang, Namjung Kang, Hyunju Sung, Hyunju Sung, Jinwoo Choi, Jinwoo Choi, Jaepil Shin, Jaepil Shin, Jaekyun Park, Jaekyun Park, Myoungseob Shim, Myoungseob Shim, Hyeongsun Hong, Hyeongsun Hong, Kyupil Lee, Kyupil Lee, "Interlayer design verification methodology using contour image", Proc. SPIE 9781, Design-Process-Technology Co-optimization for Manufacturability X, 97810V (16 March 2016); doi: 10.1117/12.2218477; https://doi.org/10.1117/12.2218477


Analyzing block placement errors in SADP patterning
Proceedings of SPIE (March 20 2016)
Correction method for radial effect caused by spin process
Proceedings of SPIE (December 26 1996)
Fast algorithm for detection of camera motion
Proceedings of SPIE (March 11 1998)
NDE of timber bridges
Proceedings of SPIE (November 14 1996)

Back to Top