5 November 2015 3D profile measurement of micro-structured array with light field microscope
Author Affiliations +
Proceedings Volume 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015; 979523 (2015) https://doi.org/10.1117/12.2216738
Event: Selected Proceedings of the Photoelectronic Technology Committee Conferences held June-July 2015, 2015, Hefei, Suzhou, and Harbin, China
Abstract
Micro-structured array is a crucial optical element with wide range of applications. The optical performance of microstructured array is determined by feature sizes of array, such as diameter, depth and the uniformity across the whole array. Those sizes can be directed retrieved from the 3D profile. We propose a 3D profile measurement system based on light field microscope, which is promising in achieving fast data acquisition by one shot. We propose the principle of measurement, develop the algorithm for focus stack calculation and 3D reconstruction. Preliminary experiments suggest the prospects and challenges.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yao Hu, Yao Hu, Haibo Gao, Haibo Gao, Shizhu Yuan, Shizhu Yuan, Rui Shi, Rui Shi, } "3D profile measurement of micro-structured array with light field microscope", Proc. SPIE 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015, 979523 (5 November 2015); doi: 10.1117/12.2216738; https://doi.org/10.1117/12.2216738
PROCEEDINGS
4 PAGES


SHARE
Back to Top