Study on monolithically integration miniaturized spectral imager by Fabry-Perot with Bragg stack

Shuyang Liu; Tao Zhou; Xiaodong Jia; Hushan Cui; Chengjun Huang

doi:10.1117/12.2229566

26 January 2016 Study on monolithically integration miniaturized spectral imager by Fabry-Perot with Bragg stack

Shuyang Liu, Tao Zhou, Xiaodong Jia, Hushan Cui, Chengjun Huang

Author Affiliations +

Proceedings Volume 9796, Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015; 979611 (2016) https://doi.org/10.1117/12.2229566
Event: Selected Proceedings of the Chinese Society for Optical Engineering Conferences held November 2015, 2015, Various, China

Abstract

To break the limitation of the traditional spectral analysis system in low speed, high cost and huge size, this paper presents a CMOS-based monolithically miniaturized spectral system whose core component is the spectral imager. The idea of the spectral imager is to fabricate a spectral filter on top of the traditional CMOS imager. This paper designed a FP thin film filter consisted of Bragg stack as a mirror while both the material and the process is compatible with the CMOS imager fabrication. By the simulation, the filter is able to achieve a 2nm spectral resolution, which is a proof for the feasibility of the miniaturized spectral analysis system.

Citation Download Citation

Shuyang Liu, Shuyang Liu, Tao Zhou, Tao Zhou, Xiaodong Jia, Xiaodong Jia, Hushan Cui, Hushan Cui, Chengjun Huang, Chengjun Huang, } "Study on monolithically integration miniaturized spectral imager by Fabry-Perot with Bragg stack", Proc. SPIE 9796, Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015, 979611 (26 January 2016); doi: 10.1117/12.2229566; https://doi.org/10.1117/12.2229566

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years