You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
26 January 2016Study on monolithically integration miniaturized spectral imager by Fabry-Perot with Bragg stack
To break the limitation of the traditional spectral analysis system in low speed, high cost and huge size, this paper presents a CMOS-based monolithically miniaturized spectral system whose core component is the spectral imager. The idea of the spectral imager is to fabricate a spectral filter on top of the traditional CMOS imager. This paper designed a FP thin film filter consisted of Bragg stack as a mirror while both the material and the process is compatible with the CMOS imager fabrication. By the simulation, the filter is able to achieve a 2nm spectral resolution, which is a proof for the feasibility of the miniaturized spectral analysis system.
The alert did not successfully save. Please try again later.
Shuyang Liu, Tao Zhou, Xiaodong Jia, Hushan Cui, Chengjun Huang, "Study on monolithically integration miniaturized spectral imager by Fabry-Perot with Bragg stack," Proc. SPIE 9796, Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015, 979611 (26 January 2016); https://doi.org/10.1117/12.2229566