Study on monolithically integration miniaturized spectral imager by Fabry-Perot with Bragg stack

Shuyang Liu; Tao Zhou; Xiaodong Jia; Hushan Cui; Chengjun Huang

doi:10.1117/12.2229566

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26 January 2016 Study on monolithically integration miniaturized spectral imager by Fabry-Perot with Bragg stack

Shuyang Liu, Tao Zhou, Xiaodong Jia, Hushan Cui, Chengjun Huang

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Proceedings Volume 9796, Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015; 979611 (2016) https://doi.org/10.1117/12.2229566
Event: Selected Proceedings of the Chinese Society for Optical Engineering Conferences held November 2015, 2015, Various, China

Abstract

To break the limitation of the traditional spectral analysis system in low speed, high cost and huge size, this paper presents a CMOS-based monolithically miniaturized spectral system whose core component is the spectral imager. The idea of the spectral imager is to fabricate a spectral filter on top of the traditional CMOS imager. This paper designed a FP thin film filter consisted of Bragg stack as a mirror while both the material and the process is compatible with the CMOS imager fabrication. By the simulation, the filter is able to achieve a 2nm spectral resolution, which is a proof for the feasibility of the miniaturized spectral analysis system.

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Shuyang Liu, Tao Zhou, Xiaodong Jia, Hushan Cui, and Chengjun Huang "Study on monolithically integration miniaturized spectral imager by Fabry-Perot with Bragg stack", Proc. SPIE 9796, Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015, 979611 (26 January 2016); https://doi.org/10.1117/12.2229566

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