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16 April 2016 Feasibility study of ZnO nanowire made accelerometer
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Vertically aligned arrays of ZnO nanowire can be used for many applications such as energy harvesters, UV sensors and mechanical sensors. Here we report the feasibility of a miniaturized accelerometer made with ZnO nanowire. For improving the sensitivity of miniaturized piezoelectric accelerometer, size of piezoelectric ceramic should be large which results in heavy accelerometer and low resonance frequency. To resolve the problem for the miniaturized accelerometer fabrication, ZnO nanowire is chosen. ZnO nanowire, which has piezoelectric property with Wurtzite structure. Since it has high aspect ratio, the use of ZnO nanowire leads to increase deformation and piezoelectric response output. The vertically ZnO nanowire array is grown on a copper substrate by hydrothermal synthesis process. Detail Fabrication process of the miniaturized accelerometer is illustrated. To prove the feasibility of the fabricated accelerometer, dynamic response test is performed in comparison with a commercial accelerometer.
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Hyun-Chan Kim, Hyun-U Ko, Sangho Song, Youngmin Yun, and Jaehwan Kim "Feasibility study of ZnO nanowire made accelerometer", Proc. SPIE 9802, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2016, 980211 (16 April 2016);

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