16 April 2016 Development of complex 3D microstructures based on computer generated holography and their usage for biomedical applications
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Abstract
The main focus of the paper is the development of technological route of the production of complex 3D microstructure, from designing it by the method of computer generated holography till its physical 3D patterning by exploiting the process of electron beam lithography and thermal replication which is used for biomedical application. A phase data of a complex 3D microstructure was generated by using Gerchberg-Saxton algorithm which later was used to produce a computer generated hologram. Physical implementation of microstructure was done using a single layer polymethyl methacrylate (PMMA) as a basis for 3D microstructure, which was exposed using e-beam lithography system e-Line and replicated, using high frequency vibration. Manufactured 3D microstructure is used for designing micro sensor for biomedical applications.
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Arvydas Palevicius, Arvydas Palevicius, Viktoras Grigaliunas, Viktoras Grigaliunas, Giedrius Janusas, Giedrius Janusas, Paulius Palevicius, Paulius Palevicius, Rokas Sakalys, Rokas Sakalys, } "Development of complex 3D microstructures based on computer generated holography and their usage for biomedical applications", Proc. SPIE 9802, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2016, 98021O (16 April 2016); doi: 10.1117/12.2218848; https://doi.org/10.1117/12.2218848
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