26 March 2016 Fabrication of optical waveguides in RbTiOPO4 single crystals by using different techniques
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Proceedings Volume 9807, Optical Technologies for Telecommunications 2015; 98070C (2016) https://doi.org/10.1117/12.2231368
Event: XIII International Scientific and Technical Conference on Optical Technologies in Telecommunications, 2015, Ufa, Russian Federation
Abstract
In this work, we have demonstrated the use of different technologies to fabricate straight channel waveguides, S-bend waveguides, Y-splitter and Mach-Zehnder (MZ) structures on RbTiOPO4 crystals and its isomorphs. We used reactive ion etching (RIE), inductively coupled plasma-RIE (ICP-RIE), femtosecond pulse laser micro-fabrication and ion diffusion techniques to structure these crystals. Computer simulations have been carried out and compared with the optical characterization of the waveguides which are in agreement with each other.
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M. A. Butt, M. A. Butt, M. C. Pujol, M. C. Pujol, R. Solé, R. Solé, A. Ródenas, A. Ródenas, G. Lifante, G. Lifante, M. Aguiló, M. Aguiló, F. Díaz, F. Díaz, S. N. Khonina, S. N. Khonina, R. V. Skidanov, R. V. Skidanov, P. Verma, P. Verma, } "Fabrication of optical waveguides in RbTiOPO4 single crystals by using different techniques", Proc. SPIE 9807, Optical Technologies for Telecommunications 2015, 98070C (26 March 2016); doi: 10.1117/12.2231368; https://doi.org/10.1117/12.2231368
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