15 December 2015 KrF laser with a power of 100 W
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Proceedings Volume 9810, International Conference on Atomic and Molecular Pulsed Lasers XII; 981002 (2015) https://doi.org/10.1117/12.2224714
Event: XII International Conference on Atomic and Molecular Pulsed Lasers, 2015, Tomsk, Russian Federation
Abstract
The development of effective discharge pulse-repetition KrF laser is informed. Research the possibility of forming in this laser long laser pulse with input pump energy for a few half periods of the discharge current are presented. In the repetitively pulsed regime (up to 100 Hz) laser provides laser pulses with energy of 1 J and duration of 60 ns at the base. The maximum total efficiency of the laser is 3%. The results of studies on the formation in this laser of narrowband radiation with a wide spectral band tuning are reported. The possibility of forming a radiation pulse with a linewidth 2 pm, energy 0.15 J and spectral tuning region 247.5-249.6 nm are demonstrated.
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Yu. N. Panchenko, Yu. N. Panchenko, M. V. Andreev, M. V. Andreev, V. F. Losev, V. F. Losev, A. V. Puchikin, A. V. Puchikin, } "KrF laser with a power of 100 W", Proc. SPIE 9810, International Conference on Atomic and Molecular Pulsed Lasers XII, 981002 (15 December 2015); doi: 10.1117/12.2224714; https://doi.org/10.1117/12.2224714
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