Planar micro-nano-coils for electrically driving liquid crystal microlenses based on wireless power transmission

Cheng Chen; Wei Hu; Jun Luo; Yu Lei; Qing Tong; Xinyu Zhang; Hongshi Sang; Changsheng Xie

doi:10.1117/12.2204807

17 December 2015 Planar micro-nano-coils for electrically driving liquid crystal microlenses based on wireless power transmission

Cheng Chen, Wei Hu, Jun Luo, Yu Lei, Qing Tong, Xinyu Zhang, Hongshi Sang, Changsheng Xie

Author Affiliations +

Proceedings Volume 9811, MIPPR 2015: Multispectral Image Acquisition, Processing, and Analysis; 981105 (2015) https://doi.org/10.1117/12.2204807
Event: Ninth International Symposium on Multispectral Image Processing and Pattern Recognition (MIPPR2015), 2015, Enshi, China

Abstract

In this paper, the planar micro-nano-coils (PMNCs) with diverse planar spiral structures are designed for electrically driving and controlling liquid crystal microlenses (LCMs) based on wireless power transmission approaches. The PMNCs with different basic shapes are fabricated, including typical micro-triangle, micro-square, micro-pentagon, micro-hexagon, and micro-circle. According to the designed microstructures, using loop iterative approximation means based on Greenhouse algorithm, the inductance values of the microcoils can be calculated through combining self-inductance with mutual-inductance. In experiments, both the wet and dry etching technologies are adapted to obtain the desired PMNCs over aluminum-coated glass substrates. The etching technologies utilized by us are implemented on initial glass substrates spread by photoresist mask, which has been processed by common ultraviolet lithography. And the wet and dry etching technologies are different in the way of eroding aluminum film. Usually, the wet etching is a kind of the chemical reaction of alkali element in the developing liquid used, but the dry etching is a type of physical etching process such as the ion beam etching so as to fabricate microstructures with smaller size than that of wet etching. After the fabrication of the PMNCs, the electrical testing circuit for the inductance of the PMNCs is built to obtain their actual inductance values. By comparing inductances with theoretical prediction, the improved PMNCs are proposed for driving and controlling LCMs, which demonstrates enhanced light transmission efficiency of the PMNCs, and makes it more efficient to adjust LCMs developed by us.

Citation Download Citation

Cheng Chen, Wei Hu, Jun Luo, Yu Lei, Qing Tong, Xinyu Zhang, Hongshi Sang, and Changsheng Xie "Planar micro-nano-coils for electrically driving liquid crystal microlenses based on wireless power transmission", Proc. SPIE 9811, MIPPR 2015: Multispectral Image Acquisition, Processing, and Analysis, 981105 (17 December 2015); https://doi.org/10.1117/12.2204807

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KEYWORDS

Inductance

Etching

Metals

Wireless energy transfer

Dry etching

Liquid crystals

Microlens

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