12 October 2016 Super resolution nano-information recording in a new hydrazone metal complex material
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Proceedings Volume 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage; 981810 (2016) https://doi.org/10.1117/12.2248354
Event: 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage, 2016, Changzhou, China
Abstract
Laser thermal lithography has been proposed for a few years, which has the advantages of breaking through the optical diffraction limit, operation in far-field and in air, and low production cost. In this paper, a new hydrazone metal complex is used as the laser thermal lithography material due to its feature of the one-step fabrication of micro/nano structure without mask and wet-etching process. Based on the laser thermal lithography method, super resolution nano-information pits are directly written on the surface of hydrazone metal complex thin films. Pits with a minimum feature size of about 79 nm are successfully obtained, which is only about 1/7 of the writing spot size. Moreover, the reactive ion etching method can be applied to transfer the pits onto a silica substrate. These results suggest the potential applications of the new material in high density optical data storage and semiconductor industries.
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Kui Zhang, Kui Zhang, Jingsong Wei, Jingsong Wei, Zhimin Chen, Zhimin Chen, Tao Wei, Tao Wei, Yongyou Geng, Yongyou Geng, Yang Wang, Yang Wang, Yiqun Wu, Yiqun Wu, } "Super resolution nano-information recording in a new hydrazone metal complex material", Proc. SPIE 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage, 981810 (12 October 2016); doi: 10.1117/12.2248354; https://doi.org/10.1117/12.2248354
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