The metal-insulator-metal diodes for infrared energy harvesting and detection applications

Elif Gul Arsoy; Mesut Inac; Atia Shafique; Meric Ozcan; Yasar Gurbuz

doi:10.1117/12.2224748

20 May 2016 The metal-insulator-metal diodes for infrared energy harvesting and detection applications

Elif Gul Arsoy, Mesut Inac, Atia Shafique, Meric Ozcan, Yasar Gurbuz

Proceedings Volume 9819, Infrared Technology and Applications XLII; 98190F (2016) https://doi.org/10.1117/12.2224748
Event: SPIE Defense + Security, 2016, Baltimore, MD, United States

Abstract

The metal-insulator-metal (MIM) diodes are considered to be very attractive candidate for infrared energy harvesting and detection applications. The high speed and compatibility with integrated circuits (IC’s) makes MIM diodes good choice for infrared (IR) regime of the electromagnetic spectrum. Moreover, it is possible to obtain large volume of devices in same unit area due to smaller active area required for MIM diodes. The aim of this work is to design and develop MIM diodes for energy harvesting and IR detection. For this work three different sets of materials; Au-Al₂O₃-Al, Au-Cr₂O₃-Cr, Au-TiO2-Ti Al₂O₃, are used for fabricating MIM diodes. Furthermore, the effect of the insulator thickness and diode active areas are investigated for Au-Al₂O₃-Al MIM diode to study diode characteristics further. The optimization of fabrication processes in physical vapor deposition (PVD) systems for the MIM diodes resulted in the devices having high non-linearity and responsivity. The non-linearity of 80 μA/V² and a responsivity of 15 A/W are achieved for Al-Al₂O₃-Au MIM diodes under low applied bias of 50 mV. The responsivity of Au-Cr₂O₃-Cr and Au-TiO₂-Ti diodes with insulating layers of Cr₂O₃ and TiO₂ are found to be 8 A/W and 2 A/W respectively.

Citation Download Citation

Elif Gul Arsoy, Mesut Inac, Atia Shafique, Meric Ozcan, and Yasar Gurbuz "The metal-insulator-metal diodes for infrared energy harvesting and detection applications ", Proc. SPIE 9819, Infrared Technology and Applications XLII, 98190F (20 May 2016); https://doi.org/10.1117/12.2224748

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available