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12 May 2016 A novel class of MEMS accelerometers for very high-G munitions environment
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The state of art in shock resistant MEMS accelerometer design is to reduce the size of the proof-mass, thereby reducing the generated forces and moments due to shock loading. Physical stops are also provided to limit proof-mass motion to prevent damage to various moving components. The reduction of the proof-mass size reduces the sensor sensitivity. In addition, to increase the sensor dynamic response, proof-mass motion needs to be minimally damped, resulting in a significant sensor settling time after experiencing a high shock loading such as those experienced by gun-fired munitions during firing. The settling time is particularly important for accelerometers that are used in gun-fired munitions and mortars for navigation and guidance. This paper describes the development of a novel class of accelerometers that are provided with the means of locking the sensor proof-mass in its “null” position when subjected to acceleration levels above a prescribed threshold, thereby protecting the moving parts of the accelerometer. In munitions applications, the proof-mass is thereby locked in its null position during the firing and is released during the flight to measure flight acceleration with minimal settling time. Details of the design and operation of the developed sensors and results of their prototyping and testing are presented. The application of the developed technology to other types of inertial sensors and devices is discussed.
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Jahangir Rastegar and Dake Feng "A novel class of MEMS accelerometers for very high-G munitions environment", Proc. SPIE 9825, Sensors, and Command, Control, Communications, and Intelligence (C3I) Technologies for Homeland Security, Defense, and Law Enforcement Applications XV, 982505 (12 May 2016);

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