A New X-Ray Reflectometer

J. Corno; B. Pardo; A Raynal

doi:10.1117/12.948778

16 December 1988 A New X-Ray Reflectometer

J. Corno, B. Pardo, A Raynal

Proceedings Volume 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers; (1988) https://doi.org/10.1117/12.948778
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

A new modular set grazing goniometer, using commercial components, for characterization of thin films or stacks is described.

Citation Download Citation

J. Corno, B. Pardo, and A Raynal "A New X-Ray Reflectometer", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); https://doi.org/10.1117/12.948778

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