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16 December 1988 Monolithic Fabry-Perot Structure For Soft X-Rays
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Abstract
The design, fabrication, and preliminary characterization and test results for reflection Fabry-Perot etalon structures operating with soft X-rays is described. The etalons were designed for maximum performance near normal incidence and for 125 Å radiation, close to the silicon L absorption edge. The structures were fabricated with a dc sputtering technique and consist of two molybdenum/silicon multilayers separated by a silicon spacer. The samples have been characterized by several complimentary methods and reflectivity measurements have been made using synchrotron radiation. The reflectance has a sharp maximum (27%) for 124 Å light incident at 10o from normal. Interference effects between the two reflectors, through the spacer, are clearly demonstrated.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Felix E. Fernandez, C. Riedel, A. Smith, B. Edwards, B. Lai, F. Cerrina, Martin J. Carr, A. D. Romig Jr., J. Corno, and L. Nevot "Monolithic Fabry-Perot Structure For Soft X-Rays", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); https://doi.org/10.1117/12.948795
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